Schematic_drawing_of_tuning_fork_gyroscope.png
Summary
Description Schematic drawing of tuning fork gyroscope.png |
English:
Schematic drawing of a proposed freestanding tuning fork gyroscope: (1) outer frame, (2) inner frame, (3) driving comb electrodes, (4) parallel plate sense electrode, (5) double folded beams, (6) anchors, (7) linear beams and (8) self-rotation ring.
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Date | |
Source | "Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping", Micromachines 2017, 8(2), 42; doi: 10.3390/mi8020042 (Fig. 1) |
Author | Minh Ngoc Nguyen et al. |
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