The 1.5 μm process is the level of MOSFET semiconductor process technology that was reached around 1981–1982, by leading semiconductor companies such as Intel and IBM.

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• NEC's 64 kbit SRAM memory chip introduced the 1.5 μm process in 1981.^[1]
• Intel 80286 CPU launched in 1982 was manufactured using this process.^[2]
• Intel introduced a 64 kbit DRAM memory chip using a 1.5 μm CMOS process in 1983.^[3]
• Ricoh RF5C164 is a 1.5 μm silicon-gate CMOS sound chip used in the Sega CD video game console, released in 1991.^[4]
• The Amiga Advanced Graphics Architecture (initially sold in 1992) included chips such as Lisa that were manufactured using a 1.5 μm CMOS process.^[5]
• Intel used the 1.5-micron process on the HMOS-III technology.^[6]
• Intel used the 1.4-micron process on the HMOS II-E technology.^[7]
• Intel used the 1.5-micron process on the CHMOS III technology.^[8][9]