Megasonic_cleaning
Megasonic cleaning is a type of acoustic cleaning related to ultrasonic cleaning. It is a gentler cleaning mechanism that is less likely to cause damage.[1] Megasonics are currently used mainly in the electronics industry in various semiconductor device fabrication processes.[2]
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Similar to ultrasonic cleaning, a megasonic cleaner utilizes a transducer that usually sits on top of a piezoelectric substrate. The transducer creates an acoustic field at a much higher frequency (typically 0.8–2 MHz) compared to ultrasonic cleaning (20-200 kHz). As a result, the cavitation that occurs is gentler and on a much smaller scale.