BioMEMS_with_X-shpaed_cantilever.png
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Summary
| Description |
English:
Electron microscope pictures of X-shaped TiN beam above TiN ground plate (height difference 2.5 µm). Due to the clip in the middle an increasing reset force develops, when the beam bends downwards. The right figure shows a magnification of the clip in the middle, compare
M. Birkholz, K.-E. Ehwald, T. Basmer et al. (2013). "
Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)
".
J. Appl. Phys.
113
: 244904.
DOI
:
10.1063/1.4811351
.
|
| Date | |
| Source | Own work |
| Author | MBirkholz |
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